Dielectric film having high refractive index and method for...

Stock material or miscellaneous articles – Composite – Of quartz or glass

Reexamination Certificate

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C428S428000, C428S433000, C428S499000, C428S701000, C428S702000, C204S192100

Reexamination Certificate

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06872452

ABSTRACT:
The high refractive dielectric film which can be used stably as a constituent material of an optical multi-layer film, namely, and which does not cause change over time in optical properties and has small film stress, is an amorphous material having no columnar structure, obtained by adding to a main component titanium oxide (TiOx: 1≦x≦2) another metal oxide (MOw: M represents a metal such as niobium, tantalum, 1≦w). Though titanium oxide is a material which tends to manifest a crystalline structure even in the form of a thin film, a mixed high refractive dielectric film can be obtained, containing titanium oxide causing little change over time in optical properties by rendering the resulting thin film amorphous by inhibiting growth of a crystal of titanium oxide by adding another metal oxide.

REFERENCES:
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patent: 07-233469 (1995-09-01), None
patent: 08-283935 (1996-10-01), None
patent: 10-332931 (1998-12-01), None
International Search Report: Form PCT/ISA210 4 sheets.

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