Dicing tape and die attach adhesive with patterned backing

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Die bond

Reexamination Certificate

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Details

C257SE21214, C257SE21599, C257SE21505, C438S464000, C438S459000, C156S060000

Reexamination Certificate

active

08008783

ABSTRACT:
Provided are a tape, apparatus, and method that relate generally to a single layer adhesive which functions as a dicing tape and also as a die attach adhesive for dicing thinned wafers and subsequent die attach operations of the diced chips in semiconductor device fabrication. The tape, apparatus, and method include a backing with a surface modification that includes a pattern.

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