Diaphragm for an integrator unit

Details Diaphragm for an integrator unit Diaphragm for an integrator unit

2005-04-26

2005-04-26

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S067000

Reexamination Certificate

active

06885434

ABSTRACT:
The invention relates to a diaphragm (1) for an integrator unit of a microlithographic projection exposure system. The diaphragm (1) includes a diaphragm opening (3), which is symmetrical with respect to a first axis of symmetry (5). The widths of the diaphragm aperture (3) in the direction of the axis of symmetry (5) are dependent on the distance (y) from the first axis of symmetry (5). The widths are greater than or equal to the width at y=0. The diaphragm (1), together with a cylindrical integrator, forms an integrator unit, which is located in an illumination system.

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“Diaphragm at quartz-rod entrance for I-line scanners”, Research Disclosure, Kenneth Mason Publications, Hampshire, Great Britain, Jul. 1999, p. 939.

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