Diamond synthesizing method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

156DIG68, 423446, 427580, 427577, C30B 2514

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active

052019861

ABSTRACT:
A diamond synthesizing method introduces a mixed gas of hydrocarbon gas and hydrogen gas into a reaction vessel (9) which is maintained under a pressure of 1 to 100 Torr. A dc discharge is caused across a cathode (1) and an anode (2), thereby depositing diamond on a substrate (3) which is placed on the anode (2). A positive column of H.alpha.>CH is produced with a high formation rate of atomic hydrogen for promoting decomposition of the hydrocarbon gas, and the concentration of hydrocarbon is reduced while maintaining the condition. According to this method, it is possible to synthesize high-quality diamond, which hardly any non-diamond carbon components such as amorphous carbon and graphite, at a film forming rate of about 1 .mu.m/h.

REFERENCES:
patent: 3317354 (1967-05-01), Darrow et al.
patent: 3961103 (1976-06-01), Aisenberg
patent: 4816286 (1989-03-01), Hirose
patent: 4830702 (1989-05-01), Singh et al.
patent: 4915977 (1990-04-01), Okamoto et al.

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