Diamond probe and forming method thereof

Details Diamond probe and forming method thereof Diamond probe and forming method thereof

1989-09-13

1991-04-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

324158P, 156632, H01J 3726

Patent

active

050102494

ABSTRACT:
The present invention provides a method of manufacturing a probe having an extremely hard and acute tip, which involves the steps of precipitating a carbon film mixed with a columnar diamond crystal and an amorphous carbonic component at a tip of a probe material; and protruding the columnar diamond crystal by selectively etching the amorphous carbonic component. According to the present invention, it is possible to improve a resolving power of the analyzing device and probe durability as well.

REFERENCES:
patent: 4668865 (1987-05-01), Gimgewski et al.
patent: 4873115 (1989-10-01), Matsumara et al.

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