Diamond growth method

Details Diamond growth method Diamond growth method

1988-08-12

1991-04-09

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156645, 156655, 156657, 156662, 156612, 156DIG68, 20419211, 252 791, 423446, 427 38, B44C 122, C03C 1500, C03C 2506

Patent

active

050062034

ABSTRACT:
Preferred embodiments first adjust reactor conditions to grow a diamondlike film (114) on a silicon substrate (102). Reactor conditions are then adjusted to etch the diamondlike film surface, providing a high density of diamond nucleation sites (108). Finally, the reactor conditions are adjusted to grow a uniform diamond film (116) on the conditioned diamondlike surface.

REFERENCES:
patent: 3661526 (1972-05-01), Angus et al.
patent: 3969489 (1976-07-01), Wu
patent: 4504519 (1985-03-01), Zelez
patent: 4544540 (1985-10-01), Tsuji
patent: 4859490 (1989-08-01), Ikegaya

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