Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1994-10-25
1997-07-08
Beck, Shrive
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427573, 427574, 427577, 4272557, H05H 102, C23C 1632, C23C 1642
Patent
active
056459009
ABSTRACT:
Composite films consisting of diamond crystallites and hard amorphous films such as diamond-like carbon, titanium nitride, and titanium oxide are provided as protective coatings for metal substrates against extremely harsh environments. A composite layer having diamond crystallites and a hard amorphous film is affixed to a metal substrate via an interlayer including a bottom metal silicide film and a top silicon carbide film. The interlayer is formed either by depositing metal silicide and silicon carbide directly onto the metal substrate, or by first depositing an amorphous silicon film, then allowing top and bottom portions of the amorphous silicon to react during deposition of the diamond crystallites, to yield the desired interlayer structure.
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Ong, T.P. et al. Properties of Diamond Composite Films Grown on Iron Surfaces; Appl Phys Lett 58 (4) 28 Jan. 1991 pp. 358-360.
Ong Tiong P.
Shing Yuh-Han
Beck Shrive
Chen Bret
Kusmiss John H.
The United States of America as represented by the Administrator
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