Measuring and testing – With fluid pressure – Leakage
Patent
1997-08-26
1999-11-09
Brock, Michael
Measuring and testing
With fluid pressure
Leakage
73 40, 417 9, 118712, G01M 304, G01M 326
Patent
active
059792256
ABSTRACT:
A quick set of procedures for diagnosing the cause of a failure in a vacuum system having a pump and a chamber is disclosed. If the base pressure of the system has failed, but the rate of rise has not, then the most likely cause of the failure may be in the pump. If the rate of rise has failed, but the base pressure has not, then the most likely cause of the failure may be in the chamber. If the base pressure and rate of rise have both failed, then the most likely cause of the failure is in the chamber, but there is a slight chance of a failure in the pump. Measurements of the partial pressures of certain residual gases in the system may indicate a leak in the system. Measurements of the partial pressures of certain residual gases while tuning off and on the lamps in the system may indicate a leak in the lamps. Measurements of the partial pressure of helium or other relevant gas, while moving a source of helium around the outside surface of the system, may determine the location of a leak.
REFERENCES:
patent: 3085198 (1963-04-01), Briggs et al.
patent: 3800586 (1974-04-01), Delatorre et al.
patent: 4409817 (1983-10-01), Edwards, Jr.
patent: 4492110 (1985-01-01), Bergquist
patent: 5365772 (1994-11-01), Ueda et al.
patent: 5777209 (1998-07-01), Tien
Applied Materials Inc.
Brock Michael
LandOfFree
Diagnosis process of vacuum failure in a vacuum chamber does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Diagnosis process of vacuum failure in a vacuum chamber, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diagnosis process of vacuum failure in a vacuum chamber will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1442017