Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate
2005-05-31
2005-05-31
Whitehead, Jr., Carl (Department: 2813)
Semiconductor device manufacturing: process
Making passive device
Stacked capacitor
C438S210000, C438S239000, C438S244000, C438S253000, C438S387000
Reexamination Certificate
active
06900107
ABSTRACT:
Methods for forming platinum-iridium films, particularly in the manufacture of a semiconductor device, and devices (e.g., capacitors, integrated circuit devices, and memory cells) containing such films.
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Jr. Carl Whitehead
Mueting, Raasch & Gebhardt, P.A
Pham Thanhha
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