Devices and methods for preventing capacitor leakage

Details Devices and methods for preventing capacitor leakage Devices and methods for preventing capacitor leakage

2005-07-20

2010-06-29

Louie, Wai-Sing (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S298000, C257S296000, C257S306000, C257S311000, C257SE21388, C257SE21388

Reexamination Certificate

active

07745865

ABSTRACT:
Devices and methods for preventing capacitor leakage caused by sharp tip. The formation of sharp tip is avoided by a thicker bottom electrode which fully fills a micro-trench that induces formation of the sharp tip. Alternatively, formation of the sharp tip can be avoided by recessing the contact plug to substantially eliminate the micro-trench.

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