Devices and methods for inspecting optical elements with a...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material

Reexamination Certificate

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C356S239100

Reexamination Certificate

active

07659976

ABSTRACT:
Described is an examination system (1) for locating contamination (2) on an optical element (4) installed in an optical system (5), which examination system (1) comprises: a spatially resolving detector (6); imaging optics (7) that magnify in particular at a magnification of between 2 times and 100 times, for magnified imaging of a surface sub-region (3a) of the optical element (4) on the spatially resolving detector (6); as well as a movement mechanism (12), in particular a motorized movement mechanism (12), for displacing the imaging optics (7) together with the detector (6) relative to the surface (3) of the optical element (4) such that any desired surface sub-region of the surface (3) can be imaged at magnification.

REFERENCES:
patent: 5390160 (1995-02-01), Sasaki
patent: 5814156 (1998-09-01), Elliott et al.
patent: 5963315 (1999-10-01), Hiatt et al.
patent: 6356347 (2002-03-01), Watanabe et al.
patent: 6392738 (2002-05-01), van de Pasch et al.
patent: 2003/0011763 (2003-01-01), Taniguchi et al.

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