Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate
2006-12-07
2010-02-09
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Transparent or translucent material
C356S239100
Reexamination Certificate
active
07659976
ABSTRACT:
Described is an examination system (1) for locating contamination (2) on an optical element (4) installed in an optical system (5), which examination system (1) comprises: a spatially resolving detector (6); imaging optics (7) that magnify in particular at a magnification of between 2 times and 100 times, for magnified imaging of a surface sub-region (3a) of the optical element (4) on the spatially resolving detector (6); as well as a movement mechanism (12), in particular a motorized movement mechanism (12), for displacing the imaging optics (7) together with the detector (6) relative to the surface (3) of the optical element (4) such that any desired surface sub-region of the surface (3) can be imaged at magnification.
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Fink Herbert
Kaller Julian
Rupp Wolfgang
Zaczek Christoph
Carl Zeiss SMT AG
Hackler Walter A.
Toatley Jr. Gregory J
Valentin Juan D
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