Device manufacturing method, lithographic apparatus and...

Photocopying – Projection printing and copying cameras – Methods

Reexamination Certificate

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C355S053000, C430S030000

Reexamination Certificate

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07630060

ABSTRACT:
A device manufacturing method is disclosed. The method includes patterning a beam of radiation, projecting the patterned beam of radiation onto a plurality of outer target portions of a substrate in a sequence in which each subsequent outer target portion is spaced-apart from a preceding outer target portion, and subsequent to projecting the patterned beam of radiation on the plurality of outer target portions, projecting the patterned beam of radiation onto an inner target portion of the substrate.

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Translation of Japanese Office Action dated Jan. 15, 2008 corresponding to Japanese Patent Application No. 2004-301690.

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