Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2004-10-13
2009-12-08
Lee, Diane I (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S053000, C430S030000
Reexamination Certificate
active
07630060
ABSTRACT:
A device manufacturing method is disclosed. The method includes patterning a beam of radiation, projecting the patterned beam of radiation onto a plurality of outer target portions of a substrate in a sequence in which each subsequent outer target portion is spaced-apart from a preceding outer target portion, and subsequent to projecting the patterned beam of radiation on the plurality of outer target portions, projecting the patterned beam of radiation onto an inner target portion of the substrate.
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Translation of Japanese Office Action dated Jan. 15, 2008 corresponding to Japanese Patent Application No. 2004-301690.
Bakker Levinus Pieter
Box Wilhelmus Josephus
Ottens Joost Jeroen
Schuurmans Frank Jeroen Pieter
Van Der Werf Jan Evert
ASML Netherlands B.V.
Lee Diane I
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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