Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate
2005-03-22
2005-03-22
Pham, Long (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
C257S767000
Reexamination Certificate
active
06870263
ABSTRACT:
A conductor for interconnecting integrated circuit components having improved reliability. The conductor includes a liner surrounding at least three surfaces of the conductor, producing a low textured conductor. It has been found that low textured conductor results in improved electromigration lifetime.
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patent: 4-267359 (1992-09-01), None
Toyoda, H. et al.; “Improvement in the Electromigration Lifetime Using Hyper-Textured Aluminum Formed on Amorphous Tantalum-Aluminum Underlayer”; 32ndAnnual Proceedings Reliability Physics Symposium, Apr. 11-14, 1994. IEEE International, pp. 178-184.
Clevenger Lawrence A.
Filippi Ronald G.
Hoinkis Mark
Hurd Jeffery L.
Iggulden Roy C.
Infineon - Technologies AG
Peralta Ginette
Pham Long
Slater & Matsil, L.L.
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