Wave transmission lines and networks – Long line elements and components – Switch
Reexamination Certificate
2005-04-19
2005-04-19
Jones, Stephen E. (Department: 2817)
Wave transmission lines and networks
Long line elements and components
Switch
C333S033000, C200S181000
Reexamination Certificate
active
06882255
ABSTRACT:
A capacitor with alterable capacitance for changing the impedance of a section of a coplanar waveguide, which may be used in particular as a high-frequency microswitch, is provided. A ground lead and a signal lead interrupted by an electroconductive connection which is self-supporting at least in some areas are provided, the capacitor including the electroconductive connection and an additional electroconductive connection connected to the ground lead. A structure connected to the electroconductive connection is provided, which is designed in such a manner that it reduces mechanical stresses which occurs in the electroconductive connection. An exemplary embodiment of the device provides for the electroconductive connection to be made of a material having coefficients of thermal expansion similar to that of silicon and a high modulus of elasticity compared to metals, in particular of molybdenum, tantalum or tungsten. The two exemplary embodiments may be combined.
REFERENCES:
patent: 5619061 (1997-04-01), Goldsmith et al.
patent: 6016092 (2000-01-01), Qiu et al.
patent: 6100477 (2000-08-01), Randall et al.
patent: 6404304 (2002-06-01), Kwon et al.
patent: 6606017 (2003-08-01), Xu et al.
patent: 100 37 385 (2002-02-01), None
Barker et al., Distributed MEMS Tru-Time Delay Phase Shifters and Wide-Band Switches, 11/98, IEEE Transactions on Microwave Theory and techniques, vol. 46, No. 11, pp. 1881-1890.*
Ulm et al.,Microelectromechanical Capacitive RF Switches on HighResistivity Silicon Substrates, Proceedings of International Conference on Microtechnologies, Sep. 25, 2000, pp. 93-96.
Park et al.,Elecrtroplated RF Means Capacitive Switches, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems, Jan. 2000, pp. 639-644.
Mueller-Fiedler Roland
Ulm Markus
Walter Thomas
Jones Stephen E.
Kenyon & Kenyon
Robert & Bosch GmbH
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