Device for transferring plate-like objects

Details Device for transferring plate-like objects Device for transferring plate-like objects

1996-07-10

1997-08-12

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414749, 414941, 414937, 901 47, B65H 508

Patent

active

056558716

ABSTRACT:
A plate-like object carrier device comprising plural arms arranged at a same pitch interval to horizontally support a wafer on each of the arms, a first motor for driving a single arm forward and backward and independently of a group of arms, a second motor for driving the group of arms forward and backward at the same time except the single arm, a power supply for supplying power to the first and second motors, and a controller for selecting whether to supply power only to the first motor or both of the first and second motors.

REFERENCES:
patent: 5007788 (1991-04-01), Asano et al.
patent: 5055036 (1991-10-01), Asano et al.
patent: 5183370 (1993-02-01), Cruz
patent: 5297910 (1994-03-01), Yoshioka et al.
patent: 5364222 (1994-11-01), Akimoto et al.

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