Device for the projection copying of masks onto a workpiece

Details Device for the projection copying of masks onto a workpiece Device for the projection copying of masks onto a workpiece

1984-08-10

1986-11-11

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

350442, G03B 2752

Patent

active

046219226

ABSTRACT:
To adjust a device for the projection copying of masks on a semiconductor substrate, adjustment marks are illuminated with wideband adjustment light in order to make variations in the intensity of the reflected signal in the area of a mark field. The color defect created by the wideband nature of the adjustment light is eliminated by an achromatization device which covers only a part of the total picture field which contains the adjustment marks.

REFERENCES:
patent: 4215935 (1980-08-01), Loebach
patent: 4405229 (1983-09-01), Mayer
patent: 4437758 (1984-03-01), Suzuki

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