Device for the low-deformation replaceable mounting of an...

Details Device for the low-deformation replaceable mounting of an... Device for the low-deformation replaceable mounting of an...

2005-09-22

2008-12-30

Thompson, Timothy J (Department: 2873)

Optical: systems and elements

Lens

With support

C359S819000

Reexamination Certificate

active

07471469

ABSTRACT:
The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).

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