Device for the detection of back-scattered electrons from a samp

Details Device for the detection of back-scattered electrons from a samp Device for the detection of back-scattered electrons from a samp

1980-05-21

1981-12-29

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, G01M 2300

Patent

active

043084575

ABSTRACT:
Disclosed is a device for the detection of back-scattered electrons emitted by a specimen in an electron microscope, comprising a converter for converting back-scattered electrons emitted by the specimen into secondary electrons, which converter includes a surface layer of a crystalline material having a low atomic number and a low electrical conductivity, preferably magnesium oxide; and a detector for detecting secondary electrons emitted by the converter. Also disclosed is an improved electron microscope embodying this detection device.

REFERENCES:
patent: 3714424 (1973-01-01), Weber
patent: 4041311 (1977-08-01), Martin
patent: 4219731 (1980-08-01), Migitaka et al.

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