Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Patent
1997-03-19
1998-12-22
Allen, Stephone B.
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
2502082, 250548, 356150, 356400, G01N 2186
Patent
active
058523006
ABSTRACT:
A sensing device, for installation in a wafer probe tester for sorting wafers according to the quality thereof, includes a main body for mounting on the wafer probe tester, an upper member and a lower member extending from the main body to define an open area therebetween for insertion of any one of different sized wafers, a plurality of light emitting devices spaced apart at fixed intervals and installed on the upper member, a plurality of light receiving devices spaced apart at respective locations opposed to the light emitting devices across the open area and installed on the lower member, and a control circuit, connected to the light emitting devices and the light receiving devices, for detecting a flat zone of any one of the different sized wafers inserted into the open area. The different sized wafers include 4 inch, 5 inch and 6 inch wafers.
REFERENCES:
patent: 4559452 (1985-12-01), Igaki et al.
patent: 4907035 (1990-03-01), Galburt et al.
patent: 5159202 (1992-10-01), Ametani
patent: 5452078 (1995-09-01), Cheng
Allen Stephone B.
Samsung Electronics Co,. Ltd.
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