Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1990-08-02
1991-08-13
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
2504411, 2504431, 2504401, H01J 3720
Patent
active
050398644
ABSTRACT:
A device for replacing an electron microscope specimen. The device moves a specimen holder from inside the atmosphere onto a specimen stage via a preliminary chamber, the stage being installed in the specimen chamber of the microscope. The device comprises a valve partitioning the preliminary chamber from the specimen chamber, a movable cylinder capable of being moved through the preliminary chamber into the specimen chamber, a hermetic seal, and a lead wire connecting the specimen holder with a terminal. The cylinder has a cover at its front end. The terminal extends through the cover and is insulated from it. A specimen insertion rod is held by a mechanism mounted in the cover. When the cylinder is inserted close to the partition valve, the hermetic seal maintains the specimen chamber airtight.
REFERENCES:
patent: 2220973 (1940-11-01), Marton
patent: 3761709 (1973-09-01), Hasegawa et al.
Japanese Utility Model Laid-Open No. 62662/1984.
Berman Jack I.
Jeol Ltd.
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