Device for reducing the peak power of a pulsed laser light...

Details Device for reducing the peak power of a pulsed laser light... Device for reducing the peak power of a pulsed laser light...

2006-02-07

2006-02-07

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular beam control device

Optical output stabilization

C372S025000, C372S093000, C372S094000

Reexamination Certificate

active

06996141

ABSTRACT:
In a device for reducing the peak power of a pulsed laser light source, in particular for a projection exposure system, there is arranged in the beam path (1) at least one beam splitter apparatus (3, 4) by means of which a detour line (5or11) is produced, via reflecting components (6, 7, 8or12, 13, 14) for at least one partial beam (1b) with subsequent recombination at a beam recombining element (9or15) with the other partial beam or beams (1bor10b) to form a total beam.

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