Device for reducing the impact of distortions in a microscope

Details Device for reducing the impact of distortions in a microscope Device for reducing the impact of distortions in a microscope

2005-08-02

2005-08-02

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S307000, C250S492200, C378S034000, C378S035000

Reexamination Certificate

active

06924489

ABSTRACT:
This invention relates to a device for reducing the impact of undesired distortions when studying a sample in an electron microscope, wherein said sample is arranged to be mounted on a micro-positioning device, characterised in that said micro-positioning device is connected with a control device, being arranged to control said micro-positioning device so as to compensate for measurement errors due to undesired distortions.

REFERENCES:
patent: 5107113 (1992-04-01), Robinson
patent: 5214282 (1993-05-01), Yamaguchi et al.
patent: 6417512 (2002-07-01), Suzuki
patent: 63202834 (1988-08-01), None
patent: 2024951 (1990-01-01), None
patent: 8273570 (1996-10-01), None
patent: 10302697 (1998-11-01), None

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