Device for recovering photoresist material exhausted from a spin

Details Device for recovering photoresist material exhausted from a spin Device for recovering photoresist material exhausted from a spin

1996-12-18

1998-07-07

Ozaja, Donald E.

Coating apparatus

Projection or spray type

With hood or offtake for waste material

118 52, 118320, 134902, 1341043, B05B 128, B05B 304, B05C 1102, B08B 304

Patent

active

057762503

ABSTRACT:
A device is for recovering superfluous photoresist material exhausted from a spin coater having a drive motor alternately operated at a high speed and a low speed at predetermined intervals. The device includes a solution collecting member into which superfluous photoresist material and cleaning solution are collected after a photoresist is coated onto a wafer and the wafer is cleaned during operation of the drive motor. The solution collecting member has a groove circumferentially formed therein to allow the superfluous photoresist material to flow therein. First and second discharge pipes communicate with the solution collecting member to drain the superfluous photoresist material and a cleaning solution and a third discharging pipe communicates with the groove formed in the solution collecting member. An actuator is provided to move a blocking member between an open position and closed position to open and close the groove.

REFERENCES:
patent: 5289822 (1994-03-01), Hurtig

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