Device for operating gas in vacuum or low-pressure...

Details Device for operating gas in vacuum or low-pressure... Device for operating gas in vacuum or low-pressure...

2008-04-29

2008-04-29

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S311000, C118S715000

Reexamination Certificate

active

11216049

ABSTRACT:
A device for operating gas in the vacuum or low-pressure environment and for observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least one spacer mounted therein for partitioning off its inside into a gas chamber and at least one buffer chamber outside the gas chamber. The gas chamber has two inner apertures provided on the spacers above and below the gas chamber. The housing has two outer apertures provided respectively on a top side thereof and a bottom side thereof. All of the inner and outer apertures are coaxial with one another and located on the thinner part. The housing has a pumping port for communication with the buffer chamber, and a gas inlet for communication with the gas chamber.

REFERENCES:
patent: 5582866 (1996-12-01), White
patent: 6403491 (2002-06-01), Liu et al.
patent: 2002/0015855 (2002-02-01), Sajoto et al.
patent: 2006/0249677 (2006-11-01), Chao et al.

Affiliated with

Also associated with

Rating

Device for operating gas in vacuum or low-pressure... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device for operating gas in vacuum or low-pressure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for operating gas in vacuum or low-pressure... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3911314