Material or article handling – Article manipulator moves analogous with human hand – finger,... – Having means to transmit motion through an imperforate barrier
Patent
1987-09-01
1988-09-06
Spar, Robert J.
Material or article handling
Article manipulator moves analogous with human hand, finger,...
Having means to transmit motion through an imperforate barrier
74110, 269 55, 269 61, 294 8641, 414751, 901 19, 901 23, B25J 100
Patent
active
047689110
ABSTRACT:
A sample transfer device (10) for manipulating a sample (S) in a pair of sealed vacuum chambers (18, 102) comprises a tubular housing (12) made from a magnetically permeable material. The housing has one closed end (14) and another flanged open end (16) for attachment to the vacuum chamber. Located inside the housing is shaft (40) of a square cross section. One end of the shaft is rotatingly connected to an inner permanent magnet (66) which can rotate with respect to the shaft but moves axially together therewith. The other end of the shaft protrudes from the housing into the vacuum chamber (110). The shaft is supported inside the housing by a bevel gear (32) which rotates in a bearing (20) in the housing. The bevel gear (32) has a square opening (38) which guides the above-mentioned square shaft during its axial movements. The gear (32) engages another gear (98) which is attached to an output shaft of a rotary drive unit (80) having its drive element outside the housing. The device can transfer a sample from one chamber to another and can position the sample in either chamber in any desired axial or angular orientation for treatment or measurement. In the illustrated embodiment, the sample is shown as a silicon substrate subjected to ion beam implantation in one chamber and to formation of a pattern by a CVD process in another chamber.
REFERENCES:
patent: 2973107 (1961-02-01), Cherel
patent: 4118943 (1978-10-01), Chellis
patent: 4319864 (1982-03-01), Kaufeldt
patent: 4618124 (1986-10-01), Flowers
Huntington Mechanical Laboratories, Inc.
Pressman David
Spar Robert J.
Underwood Donald W.
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