Material or article handling – Article manipulator moves analogous with human hand – finger,... – Having means to transmit motion through an imperforate barrier
Patent
1988-12-19
1990-01-16
Spar, Robert J.
Material or article handling
Article manipulator moves analogous with human hand, finger,...
Having means to transmit motion through an imperforate barrier
901 19, 74110, 414751, B25J 100
Patent
active
048939803
ABSTRACT:
A sample transfer device (110) for manipulating a sample in a sealed vacuum chamber comprises a tubular housing (112) made from magnetically permeable material. The housing has one end (114) closed and another attached to the vacuum chamber. Located inside the housing is a shaft (116) which is connected to a sample holder. One end of this shaft is connected to a hollow body (140) which is made from a magnetically-permeable and air-tight material. This hollow body (140) forms a sealed cavity which contains an inner permanent magnet (142). The magnet (142) is held in place by two cup-shaped members (152 and 154) and two aluminum blocks (156 and 158). The inner magnet (142) interacts with an outer permanent magnet (166) which slides over the surface of cylindrical housing (112) and moves, through magnetic force, the inner magnet and hence the shaft (116) and the sample holder with the sample in the axial direction of the housing, i.e., into a required position in the vacuum chamber. The sealed hollow body prevents the inner magnet (142), which is made from a porous samarium-cobalt alloy, from exposure to vacuum. As a result, the porous material of the magnet is protected from accumulation of impurities detrimental to characteristics of semiconductor devices treated in the vacuum chamber.
REFERENCES:
patent: 2973107 (1961-02-01), Cherel
patent: 2996330 (1961-08-01), Hutto
patent: 3101850 (1963-08-01), Quinche
patent: 4118943 (1978-10-01), Chellis
patent: 4768911 (1988-09-01), Balter
Bidwell James R.
Huntington Mechanical Laboratories, Inc.
Pressman David
Spar Robert J.
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