Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-05-23
2006-05-23
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
Reexamination Certificate
active
07049588
ABSTRACT:
The present invention relates to a device for measuring the X-ray emission produced by an object, or specimen, exposed to an electron beam. The device includes at least one subassembly or electron column, which is used to produce and control the electron beam, and a support for positioning the object measured. It also includes spectral analysis means for analyzing the X-rays emitted by the specimen to be analyzed and optical means for controlling the position of the specimen relative to the beam. The energy of the beam created and the intensity of the electron current obtained are used to meet the sensitivity, resolution and precision requirements demanded by semiconductor manufacturers. The invention applies especially to checking the fabrication of an integrated-circuit wafer.
REFERENCES:
patent: 3760180 (1973-09-01), Weber
patent: 4288692 (1981-09-01), Schamber et al.
patent: 4330709 (1982-05-01), de Chambost
patent: 4492870 (1985-01-01), de Chambost et al.
patent: 4798953 (1989-01-01), de Chambost
patent: 4873455 (1989-10-01), de Chambost et al.
patent: 4918318 (1990-04-01), de Chambost et al.
patent: 5047655 (1991-09-01), Chambost et al.
patent: 5146090 (1992-09-01), Plies
patent: 5189304 (1993-02-01), De Chambost et al.
patent: 5714757 (1998-02-01), Itabashi et al.
patent: 5939720 (1999-08-01), Todokoro
patent: 6259530 (2001-07-01), Monsallut
patent: 6936817 (2005-08-01), Feuerbaum
patent: 01 95365 (2001-12-01), None
patent: 0195365 (2001-12-01), None
De Chambost Emmanuel
Hombourger Chrystel
Monsallut Pierre
Montero Juan
Staub Pierre-Francois
Berman Jack I.
Cameca
Lowe Hauptman & Berner LLP
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