Device for liquid treatment of wafer-shaped articles

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant

Reexamination Certificate

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Details

C156S345110, C156S345230, C156S345300, C156S345550, C134S099100, C134S140000, C134S149000, C134S153000, C134S157000, C118S052000, C118S300000, C118S301000, C118S504000

Reexamination Certificate

active

09984707

ABSTRACT:
A device for liquid treatment of a defined area of a wafer-shaped article, especially of a wafer, in which a mask is kept at a defined short distance to the wafer-shaped article such that liquid can be retained between the mask and the defined area of the wafer-shaped article by capillary forces.

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