Valves and valve actuation – Electrically actuated valve – Rotary electric actuator
Patent
1991-04-26
1992-10-27
Rosenthal, Arnold
Valves and valve actuation
Electrically actuated valve
Rotary electric actuator
251 65, 251337, F16K 3108
Patent
active
051582627
ABSTRACT:
A device is set forth for interrupting a material flow by means of a shutter 5 fastened on a spindle 11, which spindle 11 is rotatably supported in a housing 1 of the device. The device is provided with a torsion spring 33 which is elastically deformable through rotation of the spindle 11, with substantially equal amounts of mechanical energy being stored in the torsion spring 33 through elastic deformation in a first position of the shutter 5. The material flow is shut off during this operation, and in a second position of the shutter 5 the material flow begins. The spindle 11 is provided with a permanent magnet 57 having pole shoes 61, 63 which are held against stops 109, 115 of a magnetic yoke 99 in the first position under the influence of the magnetic field of the magnet 57, and which are held against stops 111, 113 of the yoke 99 in the second position. The yoke 99 is provided with an electric coil 121. The shutter 5 is displaceable from a rest position to one of the two positions by an alternating current in the coil 121, whereas a direct current in the coil 121 attenuates the magnetic field of the magnet 57, so that the shutter 5 is displaced from the relevant position to the other position under the influence of the torsion spring 33. The device is suitable for use in a system for the deposition of materials in the form of thin layers on substrates. In such a system, the shutter 5 periodically interrupts a material flow coming from a source of material and aimed at the substrate, so that a desired composition of the layer is obtained.
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Kamerbeek Evert M. H.
Larsen Poul K.
Meerman Wilhelmus C. P. M.
Van Der Borst Albertus J. C.
van der Leek Johannes J.
Miller Paul R.
Rosenthal Arnold
U.S. Philips Corporation
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