Device for holding measurement instruments

Optics: measuring and testing – By light interference

Reexamination Certificate

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C403S030000

Reexamination Certificate

active

07126692

ABSTRACT:
A device for holding measurement instruments (2), in particular interferometers, is formed from a plurality of structure elements (4, 5, 6, 7) connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion α. The structure elements (4) on which the measurement instruments (2) are arranged are secured between at least two structure side parts (5) in such a way that the thermal expansions of the structure side parts (5) and of the connections (3) have no effect in the measurement direction of the measurement instruments (2).

REFERENCES:
patent: 6099193 (2000-08-01), Hangleiter et al.
patent: 6111691 (2000-08-01), Trunz et al.
patent: 6227754 (2001-05-01), von Nessen-Lapp et al.
patent: 6876452 (2005-04-01), Evans et al.
patent: 2003/0010902 (2002-07-01), Hof et al.

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