Optics: measuring and testing – By light interference
Reexamination Certificate
2006-10-24
2006-10-24
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
C403S030000
Reexamination Certificate
active
07126692
ABSTRACT:
A device for holding measurement instruments (2), in particular interferometers, is formed from a plurality of structure elements (4, 5, 6, 7) connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion α. The structure elements (4) on which the measurement instruments (2) are arranged are secured between at least two structure side parts (5) in such a way that the thermal expansions of the structure side parts (5) and of the connections (3) have no effect in the measurement direction of the measurement instruments (2).
REFERENCES:
patent: 6099193 (2000-08-01), Hangleiter et al.
patent: 6111691 (2000-08-01), Trunz et al.
patent: 6227754 (2001-05-01), von Nessen-Lapp et al.
patent: 6876452 (2005-04-01), Evans et al.
patent: 2003/0010902 (2002-07-01), Hof et al.
Hubig Norbert
Maul Guenter
Carl Zeiss SMT AG
Detschel Marissa J
Toatley , Jr. Gregory J.
Welsh & Katz Ltd.
LandOfFree
Device for holding measurement instruments does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Device for holding measurement instruments, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for holding measurement instruments will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3656922