Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent
1998-03-04
2000-01-04
Hiteshew, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
117216, 117221, 117911, C30B 3500
Patent
active
060105690
ABSTRACT:
In a device for handling heavy components of a crystal puller according to the Czochralski method, a supporting beam that can be pivoted about one vertical leg of a supporting frame and vertically adjusted includes holding claws for accommodating components or auxiliary devices. Profile rails, on which a carriage can be laterally displaced, are arranged perpendicular to the supporting beam. The carriage can be connected to a receptacle for gripping and holding the crystal.
REFERENCES:
patent: 5176490 (1993-01-01), Ibe
patent: 5762703 (1998-06-01), Schulmann et al.
patent: 5846322 (1998-12-01), Schulmann et al.
Patent Abstracts of Japan No. 63-201089 dated Aug. 8, 1988.
Patent Abstracts of Japan No. 4-321583 dated Nov. 11, 1992.
Kaiser Helmut
Schulmann Winfried
Thimm Franz
Wenske Udo
Balzers and Leybold Deutschland Holding AG
Hiteshew Felisa
Leybold Systems GmbH
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