Device for generating line-shaped light beam and laser...

Optical: systems and elements – Compound lens system – Microscope

Reexamination Certificate

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C359S368000, C359S291000, C359S224200

Reexamination Certificate

active

07002739

ABSTRACT:
A laser microscope is provided, which is low in manufacturing costs and compact in structure. A laser beam emitted from a semiconductor laser is converted into a rectilinear light beam which has divergence in one direction by use of a micromirror device. The micromirror device comprises a plurality of micromirrors arranged in a two-dimensional array, and each micromirror is vibrated at a high speed by a driving pulse. Since each micromirror is movably supported by a hinge, a mirror layer of the micromirror is displaced in a curved manner by the electrostatic attractive force caused by the driving pulse. By this curved displacement of the mirror layer, each micromirror operates as a cylindrical mirror to convert an incident laser beam into an incoherent light beam which diverges in one direction. The rectilinear beam is projected to a sample through a beam deflection device and an objective lens, and a reflected light from the sample is made incident on a linear image sensor. Since the micromirror device is relatively low in costs and a relatively large diverging angle is obtained, the laser microscope low in manufacturing costs and compact in structure can be achieved.

REFERENCES:
patent: 3947093 (1976-03-01), Goshima et al.
patent: 6147789 (2000-11-01), Gelbart
patent: 6513939 (2003-02-01), Fettig et al.
patent: 6660964 (2003-12-01), Benderly
patent: 6661561 (2003-12-01), Fitzpatrick et al.
patent: 2004/0113059 (2004-06-01), Kawano et al.
U.S. Appl. No. 60/433,825.

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