4. Radiant energy
  5. Photocells; circuits and apparatus
  6. Optical or pre-photocell system

Daikichi Awamura

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Apparatus for automatically adjusting a microscope in focus

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Apparatus for detecting defects in patterns

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Apparatus for detecting defects in patterns

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Apparatus for detecting defects in patterns

Optics: measuring and testing – Refraction testing – Prism engaging specimen
Patent

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Device for generating line-shaped light beam and laser...

Optical: systems and elements – Compound lens system – Microscope
Reexamination Certificate

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Profile ID: LFUS-PAI-P-878310

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