Device for exciting a plasma to electron cyclotron resonance by

Details Device for exciting a plasma to electron cyclotron resonance by Device for exciting a plasma to electron cyclotron resonance by

1994-02-25

1996-07-16

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912143, 21912152, 219748, 20429819, 20429837, B23K 1000

Patent

active

055369146

ABSTRACT:
The invention relates to a plasma excitation device comprising at least one electrically conductive wire applicator fed form an energy source in the microwave range and means for creating a magnetic field and adapted to create at least one surface having a constant magnetic field of a flux density that corresponds to electron cyclotron resonance. According to the invention, the wire applicator includes the means for creating the magnetic field, with the main component thereof being situated in a cross-section of the applicator and extending over at least a fraction of the length of the applicator, said applicator thus constituting an applicator both of a microwave electric field and of a static magnetic field.

REFERENCES:
patent: 4745337 (1988-05-01), Pichot et al.
patent: 5216329 (1993-06-01), Pelleteir
patent: 5227695 (1993-07-01), Pelletier et al.
patent: 5234565 (1993-08-01), Yoshida
patent: 5311103 (1994-05-01), Asmussen et al.
patent: 5370765 (1994-12-01), Dandl

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