4. Electric heating
  5. Metal heating
  6. By arc

Metal Process (Societe a Responsabilite Limitee)

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Device for exciting a plasma to electron cyclotron resonance by

Electric heating – Metal heating – By arc
Patent

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Method of producing a plasma by capacitive-type discharges...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of producing individual plasmas in order to create a...

Electric heating – Metal heating – By arc
Reexamination Certificate

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