Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-12-11
2007-12-11
Punnoose, Roy M. (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
11783476
ABSTRACT:
This invention concerns a device for ellipsometric two-dimensional display of a sample placed in an incident medium, observed between a convergent light cross-reflected analyser and polarizer, wherein the ellipsometric parameters of the ensemble formed by the sample and a substrate whereon it is placed, are processed. The substrate comprises a base and a stack of layers of base and its ellipsometric properties are known. The ellipsometric properties of the substrate are such that the variations of the ellipsometric parameters of the sample are displayed with a contrast greater than the contrast produced in the absence of such substrate. The invention also concerns a display method and an ellipsometric measurement method with spatial resolution.
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Ausserre Dominique
Valignat Marie-Pierre
Centre National de la Recherche Scientifique "CNRS"
Punnoose Roy M.
Universite Pierre et Marie Curie
Young & Thompson
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