Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-04-24
2007-04-24
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C250S225000
Reexamination Certificate
active
10450958
ABSTRACT:
A device for ellipsometric two-dimensional display of a sample placed in an incident medium, observed between an analyser and a polarizer intersected by convergent light reflection, wherein the ellipsometric parameters of the assembly formed by the sample and a substrate whereon it is placed, are used. The substrate comprises a support and a stack of base layers and its ellipsometric properties are known. The ellipsometric properties of the substrate are such that variations of the sample ellipsometric parameters are displayed with contrast higher that the contrast produced in the absence of the substrate. The invention also concerns a display method and an ellipsometric measurement method with spatial resolution.
REFERENCES:
patent: 5333052 (1994-07-01), Finarov
patent: 5450201 (1995-09-01), Katzir et al.
patent: 43 11 726 (1995-01-01), None
patent: 197 08 036 (1998-09-01), None
patent: WO 97 44633 (1997-11-01), None
Jin G et al:, “Imaging Ellipsometry for the Visualization of Bio-Molecular Layers” Engineering in Medicine and Biology Society, 1998. Proceedings of the 20thAnnual International Conference of the IEEE Hong Kong, China Oct. 29-Nov. 1, 1998, Piscataway, NJ, USA IEEE, Oct. 29, 1998, pp. 581-584, XP001035145 ISBN: 0-7803-5164-9 p. 581, colonne de droite, derniere ligne-p. 582, colonne de droite, ligne 2.
Shatalin S V et al:, “Polarisation Contrast Imaging of Thin Films in Scanning Microscopy” Optics Communications, North-Holland Publishing Co. Amsterdam, NL, vol. 116, No. 4/6, May 1, 1995, pp. 291-299, XP000498326 ISSN: 0030-4018 p. 296, colonne de gauche, ligne 3 -colonne de droite, ligne 3.
Dicke J et al:, “Ellipsomicroscopy for Surface Imaging: Contrast Mechanism, Enhancement, and Application to Co Oxidation on PT (110)”, Journal of Optical Society of America A (Optics, Image Science and Vision), Jan. 2000, Opt. Soc America, USA, vol. 17, No. 1, pp. 135-141, XP002182387 ISSN: 0740-3232 p. 136, colonne de gauche, dernier alinear -p. 137, colonne de droite, alinea 1.
Patent Abstracts of Japan, vol. 1996, No. 02, Feb. 29, 1996 & JP 07 261092 A (Hamamatsu Photonics KK), Oct. 13, 1995 abrege.
R.M.A. Azzam, N.M.Bashara: “Ellipsometry and Polarized Light” 1987, North-Holland, Amsterdam XP002195238 ISBN: 0-444-87016-4 (paperback) cite dans la demande p. 174, ligne 1-derniere ligne, p. 260, alinea 3 -p. 262, alinea 2 p. 265, dernier alinea—p. 268, dernier alinea p. 357, alinea 1—alinea 2.
Ausserre Dominique
Valignat Marie-Pierre
Centre National de la Recherche Scientifique "CNRS"
Punnoose Roy M.
Toatley , Jr. Gregory J.
Universite Pierre et Marie Curie
Young & Thompson
LandOfFree
Device for ellipsometric two-dimensional display of a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Device for ellipsometric two-dimensional display of a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for ellipsometric two-dimensional display of a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3749480