Device for electrically contacting a floating semiconductor wafe

Details Device for electrically contacting a floating semiconductor wafe Device for electrically contacting a floating semiconductor wafe

1999-04-21

2000-09-05

Metjahic, Safet

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324765, G01R 3102

Patent

active

061148652

ABSTRACT:
The invention relates to a device for contacting and electrically grounding semiconductor substrate coated with or otherwise having an insulating film positioned thereover. The device includes a chuck having a wafer support surface which holds the wafer and a scriber movably attached to the chuck. The scriber is configured to contact the wafer through an opening in the chuck and to produce a perforation through the insulating film. The device further includes an electrically conductive probe movably attached to the chuck and configured to be moved into an access opening in the chuck to contact the semiconductor substrate through the perforation. Thus, the device increases the accuracy of open circuit type measurements of the wafer surface potential, particularly for Kelvin and Monroe electrode measurements of electrical properties of insulating films on semiconductor substrates.

REFERENCES:
patent: 4812756 (1989-03-01), Curtis et al.
patent: 4950977 (1990-08-01), Garcia et al.
patent: 4978915 (1990-12-01), Andrews, Jr. et al.
patent: 5216362 (1993-06-01), Verkuil
patent: 5394101 (1995-02-01), Mitros
patent: 5410162 (1995-04-01), Tigelaar et al.
patent: 5444389 (1995-08-01), Hirae et al.
patent: 5498974 (1996-03-01), Verkuil et al.
patent: 5773989 (1998-06-01), Edelman et al.
patent: 5815000 (1998-09-01), Farnworth et al.
patent: 5847423 (1998-12-01), Yamamichi

Affiliated with

Also associated with

Rating

Device for electrically contacting a floating semiconductor wafe does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device for electrically contacting a floating semiconductor wafe, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for electrically contacting a floating semiconductor wafe will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2215912