Device for distributing a microwave energy for exciting a plasma

Details Device for distributing a microwave energy for exciting a plasma Device for distributing a microwave energy for exciting a plasma

1992-01-22

1993-06-01

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 31511171, 31323131, H05H 118

Patent

active

052163296

ABSTRACT:
A device for distributing microwave energy in order to excite a plasma inside an enclosure includes one or more applicators. Each applicator is placed inside the inter-magnet zone and extends in distant relationship to the confinement surface and to the enclosure wall, while being positioned outside the surface having a constant magnetic field and an intensity corresponding to the electronic cyclotron resonance, so as to ensure the confinement and propagation of the microwave energy between the wall and the applicator, outside of the surface.

REFERENCES:
patent: 4713585 (1987-12-01), Ohno et al.
patent: 4716491 (1987-12-01), Ohno et al.
patent: 4745337 (1988-05-01), Pichot et al.
patent: 4810935 (1989-03-01), Boswell
patent: 4939424 (1990-07-01), Kieser et al.
patent: 4992696 (1991-02-01), Prueitt et al.
patent: 5081398 (1992-01-01), Asmussen et al.

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