Device for detecting secondary electrons in a scanning electron

Details Device for detecting secondary electrons in a scanning electron Device for detecting secondary electrons in a scanning electron

1981-07-22

1984-04-10

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3726

Patent

active

044423551

ABSTRACT:
In one type of scanning electron microscope, a specimen is inserted substantially centrally in a gap between the magnetic pole pieces of an objective lens and the secondary electrons from the specimen are detected by the detecting means disposed upwardly of the objective lens. In this invention, a pipe electrode is incorporated along the optical axis of the objective lens between the objective lens and the detecting means so that the primary electron beam irradiating the specimen is not adversely affected by the detecting means. Further, a mesh electrode maintained at positive potential against the specimen is incorporated at the bottom end of the pipe electrode so that almost all the secondary electrons from the specimen are attracted toward the detecting means.

REFERENCES:
patent: 3474245 (1969-10-01), Kimura et al.
patent: 3694652 (1972-09-01), Banburg
patent: 3760180 (1973-09-01), Weber
patent: 3896308 (1975-07-01), Venables et al.

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