Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1992-11-10
1994-07-12
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
H01J 3720
Patent
active
053291255
ABSTRACT:
The invention relates to a device for corpuscular-optical examination and/or processing of material samples in which the column and the table system are rotatable relative to one another about a first axis of rotation which encloses a specific angle of inclination with a perpendicular to the object plane, the column being arranged in such a way that its optical axis forms the same angle of inclination with the first axis of rotation. A device of this type is distinguished over known constructions by a substantially simpler construction.
REFERENCES:
patent: 3086112 (1963-04-01), Riecke
patent: 3629577 (1971-12-01), Karlsruhe et al.
patent: 4460827 (1984-07-01), Onoguchi et al.
patent: 4627009 (1986-12-01), Holmes et al.
patent: 5229607 (1993-07-01), Matsui et al.
Anderson Bruce C.
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterprufte
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