Device equipped with floating rigid microstructure elements

Details Device equipped with floating rigid microstructure elements Device equipped with floating rigid microstructure elements

1998-12-23

1999-09-07

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257417, 257418, H01L 2982

Patent

active

059491191

ABSTRACT:
A device having at least one element of a floating rigid microstructure element made of a structure layer(s) and a rigidity lining which increases its resistance to flexing and to torsion. The increased rigidity of the microstructure element allows the thickness and/or the width to be reduced, particularly of the structure layer(s) and hence allows an increase in the thermal resistance.

REFERENCES:
patent: 3638481 (1972-02-01), Wilner
patent: 5021663 (1991-06-01), Hornbeck
patent: 5072288 (1991-12-01), MacDonald et al.
patent: 5367167 (1994-11-01), Keenan
patent: 5397904 (1995-03-01), Arney et al.

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