Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2003-10-15
2010-06-01
Hassanzadeh, Parviz (Department: 1792)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C118S7230EB, C118S7230VE, C118S715000
Reexamination Certificate
active
07727335
ABSTRACT:
According to a first aspect, the present invention relates to a device for depositing a high temperature superconductor onto a substrate in vacuum comprising a refilling device for containing a stock of high temperature superconductor material, an evaporation device, that evaporates the high temperature superconductor material within an evaporation zone by means of an energy transferring medium, and a conveyor that transports the high temperature superconductor material continuously from the refilling device to the evaporation zone in such a way that the high temperature superconductor material delivered into the evaporation zone is evaporated essentially without residues. According to a further aspect, the present invention relates to a method to evaporate a high temperature superconductor coating onto a substrate in vacuum, comprising the steps of continuous delivery of granular high temperature superconductor material into an evaporation zone and the operation of a beam of an energy transferring medium, so that the delivered granulate is evaporated in the evaporation zone essentially without residues.
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Adams and Reese LLP
Dhingra Rakesh K
Ferrera Raymond R.
Hassanzadeh Parviz
Theva Dunnschichttechnik GmbH
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