Device and method for testing an exposure apparatus

Details Device and method for testing an exposure apparatus Device and method for testing an exposure apparatus

2006-12-05

2006-12-05

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Methods

C355S052000, C355S055000

Reexamination Certificate

active

07145644

ABSTRACT:
A device and a method for testing an exposure apparatus is disclosed. A testing device includes a substrate, and a plurality of block patterns, each of which has a top area varying with an area of a shot region of the exposure apparatus, having at least two different heights located on the substrate. Additionally, the method for testing an exposure apparatus includes using the exposure apparatus to perform an exposure process on the testing device or on the testing device having a photoresist layer thereon, and testing the performance of the exposure apparatus through comparing surface information of the testing device computed by the exposure apparatus with actual surface information of the testing device or through examining photoresist patterns formed on the testing device.

REFERENCES:
patent: 4475811 (1984-10-01), Brunner
patent: 5402224 (1995-03-01), Hirukawa et al.
patent: 5776640 (1998-07-01), Bae
patent: 6368763 (2002-04-01), Dirksen et al.
patent: 2003/0133099 (2003-07-01), Shiode

Affiliated with

Also associated with

Rating

Device and method for testing an exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device and method for testing an exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device and method for testing an exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3717909