Device and method for scrubbing and cleaning substrate

Details Device and method for scrubbing and cleaning substrate Device and method for scrubbing and cleaning substrate

1993-05-28

1994-09-13

Roberts, Edward L.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 77, A46B 1304

Patent

active

053456394

ABSTRACT:
A substrate scrubbing and cleaning device comprising a mechanism having an upper and a lower brush members for scrubbing both surfaces of an LCD glass substrate, a mechanism for rotating the upper and lower brush members, a mechanism for supplying pure water to the upper and lower brush members, a mechanism for carrying the substrate between the upper and the lower brush members to reciprocate it relative to the upper and lower brush members in a substrate carrying direction, and a controller for controlling the operation of the substrate carrying mechanism.

REFERENCES:
patent: 4109337 (1978-08-01), Hillman et al.
patent: 5081733 (1992-01-01), Kudo
patent: 5092011 (1992-03-01), Gommori

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