Device and method for optical nanoindentation measurement

Details Device and method for optical nanoindentation measurement Device and method for optical nanoindentation measurement

2008-08-28

2010-12-07

Williams, Hezron (Department: 2856)

Measuring and testing

Hardness

By penetrator or indentor

Reexamination Certificate

active

07845214

ABSTRACT:
This invention relates to a device and method for optical nanoindentation measurement, according to which respective measurement results are obtained by having an indenter tip apply load to a fixed portion of a thin film, having an indenter tip apply load to a non-fixed portion of a thin film, and having a vibrating component transmit the dynamic properties of the vibration to the thin film. By combining the above measurement results in calculations, the Young's modulus, the Poisson's ratio, and the density of the thin film can be obtained.

REFERENCES:
patent: 2005/0103120 (2005-05-01), Liu et al.
patent: 2006/0186874 (2006-08-01), Mackin et al.
patent: 2007/0151340 (2007-07-01), Hsu et al.

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