Device and method for feeding treating air

Details Device and method for feeding treating air Device and method for feeding treating air

2005-04-19

2005-04-19

Ghyka, Alexander (Department: 2812)

Semiconductor device manufacturing: process

Radiation or energy treatment modifying properties of...

C438S800000, C165S228000, C414S935000, C454S187000

Reexamination Certificate

active

06881685

ABSTRACT:
An air-supply machine cleans outside air. The cleaned outside air is dehumidified by cooling by performing heat exchange between the cleaned outside air and an exhaust air from a lithography apparatus by a first heat-pipe. The dehumidified outside air is heated by performing heat treatment between the dehumidified outside air and an exhaust air from a vertical heat treatment apparatus by a second heat-pipe. The heated outside air is supplied to inside the housing of the vertical heat treatment apparatus. Thereby, the consumption of air in the clean room is reduced and the running cost of the clean room is reduced.

REFERENCES:
patent: 6547660 (2003-04-01), Suenaga et al.
patent: 20020179283 (2002-12-01), Suenaga et al.
patent: 20030167781 (2003-09-01), Thompson et al.
patent: 04-254126 (1992-09-01), None
patent: 2000-18636 (2000-01-01), None
patent: 2000-39203 (2000-02-01), None
patent: 2000-205599 (2000-07-01), None
patent: 2001-176762 (2001-06-01), None

Affiliated with

Also associated with

Rating

Device and method for feeding treating air does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device and method for feeding treating air, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device and method for feeding treating air will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3432633