Device and method for determining an optical property of a mask

Details Device and method for determining an optical property of a mask Device and method for determining an optical property of a mask

2011-01-04

2011-01-04

Nguyen, Tu T (Department: 2886)

Optics: measuring and testing

By configuration comparison

Reexamination Certificate

active

07864319

ABSTRACT:
A coordinate measuring machine (1) including a plane (25a) in which there is arranged a movable measurement table (20) moving the mask (2) correspondingly in the plane (25a), at least one objective (9) and a detector (11), an incident light source (14) arranged to provide incident light and/or a transmitted light source (6) arranged to provide transmitted light, wherein the mask (2) has at least a first area (41) and a second area (42), wherein the first area (41) and the second area (42) comprise different materials differing in their transmission or reflection properties.

REFERENCES:
patent: 5563702 (1996-10-01), Emery et al.
patent: 7298496 (2007-11-01), Hill
patent: 7355690 (2008-04-01), Elyasaf et al.
patent: 2005/0254068 (2005-11-01), Rinn et al.

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