Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate
2005-04-12
2008-08-05
Le, Hoa V (Department: 1795)
Cleaning and liquid contact with solids
Processes
With treating fluid motion
C430S322000
Reexamination Certificate
active
07407554
ABSTRACT:
Methods of developing or removing a select region of block copolymer films using a polar supercritical solvent to dissolve a select portion are disclosed. In one embodiment, the polar supercritical solvent includes chlorodifluoromethane, which may be exposed to the block copolymer film using supercritical carbon dioxide (CO2) as a carrier or chlorodiflouromethane itself in supercritical form. The invention also includes a method of forming a nano-structure including exposing a polymeric film to a polar supercritical solvent to develop at least a portion of the polymeric film. The invention also includes a method of removing a poly(methyl methacrylate-b-styrene) (PMMA-b-S) based resist using a polar supercritical solvent.
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Colburn Matthew E.
Shneyder Dmitriy
Siddiqui Shahab
Hoffman Warnick LLC
International Business Machines - Corporation
Le Hoa V
Petrokaitis Joseph
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